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Not really sure about in fabs for manufacturing, but whenever I was in college I had access to an electron microscope. It had its own foundation separate from the rest of the building to minimize vibrations. I’m sure there’s more to it than that, but that’s at least one technique.
It’s probably got a very complex and intricate shock absorption system
When the machines cost literally hundreds of millions of dollars each, spending a few hundred thousand on them to make sure they're earthquake proof is a no brainer.