Factorio

I don't have a specific checklist, but I can tell you what I like to do to try and stay on task.

What I usually like to do is make a world in editor mode and design small parts of that factory that I know I will need, like I know I will need enough smelters to fill a belt of iron, or I know I will need to produce each type of science. I copy those designs to blueprints, and place them back in the main world where I need them to be. At this point, it's just a matter of placing buildings down where the ghosts say they should go, routing materials between factory sections, and scaling the factory up to deal with resource shortages.

I find that designing the factories in editor mode makes the process go much smoother, since there is not much getting in the way. No placement/breaking range limit, no resource limit, instantly able to copy and paste buildings, and the ability to use infinity chests to test throughput all make the designing process much easier for me.